product description

The extreme ultraviolet beam transmission system is one of the key systems of the Large Continuous Phase Light Source (DCLS) light source technology. It is mainly used to efficiently transmit extreme ultraviolet beams that are generated in vacuum and cannot be transmitted in the air to experimental research work. stand.

Chuangpu Instruments undertook and completed the optical design, engineering design, online installation and integrated testing of the beam transmission system. The light debugging results met the expected index requirements, and it has been successfully delivered and put into use.

Main parameters

● Wavelength range: 30-180nm

● Receiving angle: 4.0σ@100nm

● Spot size at sample: 1.0×1.0 mm²

●Online spectrum diagnosis: 10000 resolution

● Size data: Total length 30 meters, 4 lines (8 stops)

Test Data