PRODUCT SERIES
Product Category
Beam cross section measurement system
Category:
widget module
400-8877-750 sales@specreation.com
产品介绍
设备特点
应用简介
Feature
●High repeat positioning accuracy
●Safe and reliable
●Modular design
●Wide applicability
Main parameter
| Dimensions: customized according to customer needs | Weight:≤25Kg | Flange interface: CF35/CF63/CF100, multiple options available |
| Open loop repeatable positioning accuracy: ±10μm | Closed-loop repeat positioning accuracy: ±2μm | Limit response: ≤10ms |
| Working speed: ≤6mm/s | Drive stroke: 120mm or customized | Number of targets: 3 or customized |
| Target type: correction target/YAG/OTR | Field of view: 30×30 or customized | Image resolution: 20μm or customized |
| Image data communication: 100M Ethernet communication | Ambient temperature:-20°C~ 60°C | Vacuum parameters: ultimate vacuum is better than 5.0X10 -8 Pa |
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Description:
SPECREATION
Add:Building 11, Yingtang Industrial Park II, No. 103 Huatuo Lane, Shulu Community Service Center, High-tech Zone, Hefei, Anhui
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0551-62897780
sales@specreation.com