Radio frequency plasma cleaning system

The radio frequency plasma cleaning system is based on radio frequency plasma discharge technology and is a professional equipment used for cleaning optical components. The equipment is an integrated design, and with the support of functions such as high-precision gas flow quality control and automatic impedance matching, it has good system stability and environmental adaptability.

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widget module

400-8877-750 sales@specreation.com

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产品介绍

设备特点

应用简介

Product Features

●Self-matching power source does not require manual adjustment
●RS485, I/O□Multiple communication methods
●Customized software functions and interfaces
●High-precision mass flow control system
●Small size, high integration
●Powerful expansion functions

Main parameters

Dimensions	510×510×530 (W×H×D unit: mm)
power	0-500W continuously adjustable
Protect	Overcurrent, overvoltage, overheating, excessive reflection
Control System	Touch screen + automatic control
weight	≤40Kg
Output cable	5m
Power frequency	13.56MHz
Applicable cavity volume	0.3-1m ³
Air system	Standard configuration: 2 channels, flow rate 0-300sccm adjustable (expandable)