PRODUCT SERIES
Toroidal grating monochromator
Product Introduction
The toroidal grating monochromator uses aberration-corrected toroidal grating for diffraction and spectroscopy, which can ensure high spectral resolution and luminous flux in a wide spectral range. By selecting different grating models, spectral coverage in the 10-300nm range can be achieved.
Main parameters
● Wavelength range: 10~300nm
● Low astigmatism
● High vacuum compatible, 10 -4 Pa, ultra-high vacuum can be customized, 10 -7 Pa
● With 5μm~300μm online continuously adjustable slit
● Single optical element design, simple structure and high efficiency
● With long-range laser rapid aiming and positioning function
● Spectral resolution: 0.1nm@37.93nm, can be optimized according to needs
Optional range:
|
Spectrometer model |
Included angle |
Line density |
Wavelength range |
Incident arm length |
Exit arm length |
Line dispersion |
|
VuSpec-TGM-900 |
142 |
550 |
10~50 |
319.9 |
319.5 |
1.60~1.80 |
|
vuSpec-TGM-910 |
142 |
550 |
15~150 |
319.9 |
319.5 |
1.20~1.80 |
|
vuSpec-TGM-920 |
142 |
275 |
50~300 |
319.9 |
319.5 |
2.30~2.50 |
Applications
 |
 |
 |
 |
|
Strong field and high energy density physics |
Integrated circuit manufacturing |
Detector and light source metrology grade calibration |
Extreme Ultraviolet Reflectance Study |
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SPECREATION
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