PRODUCT SERIES
Product Category
Langmuir probe
Category：
Detection and Diagnosis
400-8877-750 sales@specreation.com
产品介绍
设备特点
应用简介
Product Features
●Real-time online monitoring:
①Plasma density
②Electron temperature
③Ion current density ④Plasma
potential
⑤Suspension potential
⑥Electron energy distribution function (EEDF)
Main parameters
Plasma and measurement requirements:
| plasma | Measurement requirements |
| suspension potential | -45V~45V |
| plasma potential | -40V~45V |
| plasma density | 10 8 ~10 13 cm -3 |
| Ion current density | 100μA/cm²~500mA/cm² |
| electronic temperature | 0.1~5eV |
| electron energy distribution function | 0~30eV |
Probe electronics parameter range:
| Probe Electronics Parameters | scope |
| Voltage scan range | -50V~50V |
| Current scan range | 100μA~500mA |
| scanning frequency | 100Hz~1000Hz |
| Data resolution | 10bit |
| Sampling rate | 65MS/s |
| Time resolution | 15ns |
| communication method | USB2.0 |
Applications
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| Plasma physics research | Low-temperature plasma technology in etching processes | Metal welding processing | Military aircraft stealth design |
Relative Products
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SPECREATION
Add：Building 11, Yingtang Industrial Park II, No. 103 Huatuo Lane, Shulu Community Service Center, High-tech Zone, Hefei, Anhui
Email：sales@specreation.com
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