VPCTL series/UHVPCTL series high-precision vacuum displacement stage

The VPCTL series and UHVPCTL series high-precision vacuum displacement stages use crossed roller guides and come with a vacuum-specific incremental grating ruler. Together with a vacuum stepper motor, they can achieve high-precision linear motion and use a self-developed controller to achieve closed-loop control. Very suitable for precision motion fields in vacuum environments.

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Precision motion mechanisms and accessories

400-8877-750 sales@specreation.com

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产品介绍

设备特点

应用简介

Product Features

●Ultra-high precision
●With self-locking
●Grating ruler closed-loop control
●Limit switch stroke adjustable
●Compatible with vacuum environment

Main parameters

	model	VPCTL6-10 /UHVPCTL6-10	VPCTL8-20 /UHVPCTL8-20	VPCTL10-30 /UHVPCTL10-30	VPCTL8-10 /UHVPCTL8-10	VPCTL12-30 /UHVPCTL12-30	VPCTL12-50 /UHVPCTL12-50
Mechanical specifications	Stroke/mm	10	20	30	10	30	50
	Table size/mm x mm	60×60	80×80	100×100	80×80	120×120	120×160
	transfer method	nut screw
	guide	Crossed roller guide
	Material	aluminum
Accuracy specifications	Resolution/μm	0.5
	Repeat positioning accuracy/μm	±1
	Pitch accuracy/”	±5	±5	±8	±5	±8	±10
	Deflection accuracy/”	±5	±5	±8	±5	±8	±10
	Load bearing/Kg	3	6	6	10	10	10
Electrical Specifications	Limit	Electronic limit
	grating	Incremental
	stepper motor	2 phases, rotation angle 1.8°
	Supply voltage/V	24±10%
	control interface	DB15
	controller	Optional
	Applicable vacuum degree	VPCTL series is suitable for 10 ^-4 Pa, UHVPCTL series is suitable for 10 ^-7 Pa