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Radio frequency plasma cleaning system
The radio frequency plasma cleaning system is based on radio frequency plasma discharge technology and is a professional equipment used for cleaning optical components. The equipment is an integrated design, and with the support of functions such as high-precision gas flow quality control and automatic impedance matching, it has good system stability and environmental adaptability.
Details 白箭头 黑箭头
Precision adjustable slit
The precision adjustable slit is one of the important components in the optical system. After years of application and verification, the structure design is reasonable, the process route is mature, the operation is stable and reliable, and the slit opening is symmetrically adjustable online.
Details 白箭头 黑箭头
Beam cross section measurement system
The beam cross-section measurement system uses YAG or OTR to convert the invisible light beam or electron beam into a visible light spot, and observes the position and size of the spot through the optical imaging system to infer the position and size of the light beam or electron beam. The position of the target or other components of the system can be quickly and accurately switched, and a real-time video monitoring module is configured to provide online viewing capabilities. According to the radiation requirements, you can choose the straight-through video surveillance module and the corner video surveillance module.
Details 白箭头 黑箭头
Safety shutter
Safety shutter is a kind of ultra-high vacuum compatible safety protection equipment. It is pneumatically driven and can be equipped with a water-cooling mechanism as needed. It is widely used in large scientific equipment such as beam lines and can play a very good safety protection role for downstream equipment. The equipment has high stability and long service life.
Details 白箭头 黑箭头
Water-cooled four-blade diaphragm
The water-cooled four-blade diaphragm is an auxiliary device compatible with ultra-high vacuum. The diaphragm opening can be adjusted manually or electrically. It can be completely closed and can effectively block upstream stray light from entering the downstream system as needed. This device has a water-cooled structure and can be used in high-energy beam line systems. It has the characteristics of compact structure and easy adjustment.
Details 白箭头 黑箭头
Four-blade diaphragm pump station
The four-knife aperture type pumping station is an ultra-high vacuum compatible auxiliary equipment that has the functions of a four-knife aperture and a pumping station. The aperture opening can be adjusted manually or electrically, which can be completely closed, effectively blocking upstream stray light from entering the downstream system as needed. This device is equipped with an ion pump, which can maintain the vacuum environment of the system.
Details 白箭头 黑箭头
Fluorescent target pump station
The fluorescent target pumping station is an ultra-high vacuum compatible auxiliary equipment that has the functions of both a fluorescent target and a pumping station. The fluorescent target uses a fluorescent screen or YAG sheet to convert the invisible light spot into a visible light spot, and observes the position and size of the spot through an optical imaging system to infer the position and size of the light beam. The target of the system can be quickly and accurately switched to enter or leave the optical path, and is equipped with a real-time video monitoring module to provide online viewing capabilities. This device is equipped with an ion pump, which can maintain the vacuum environment of the system.
Details 白箭头 黑箭头
Baking equipment and modules
本产品是一款智能温度控制设备,采用人工智能算式,仪表启动自整定,可根据被控对象的特性,自动寻找最优参数以达到很好的控制效果,无需人工整定参数。控温精度最高可达士0.1°C,无超调、欠调。适用于需要进行高精度多段曲线程序升/降温控制的系统。
Details 白箭头 黑箭头
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